Out-of-equilibrium body potential measurements in pseudo-MOSFET for biosensing

A novel method for surface charge sensing using the Ψ-MOSFET is presented. Systematic measurements of out-of-equilibrium body potential were performed on SOI wafers. The interest of Ψ-MOSFET as a biochemical sensor is experimentally proved. The advantages of this method are good sensitivity, simplicity and low-voltage reading compared to the conventional I
_D
-V
_G
method.