Assessing the accuracy of the open, short and open-short de-embedding methods for on-chip transmission line S-parameters measurements

A qualitative assessment of the accuracy for different de-embedding methods is presented in this paper. For the realization of this work, four procedures are analyzed. The open, short, open-short and multiline methods are applied to S-parameters measurements of four microstrip lines and dummy structures. The samples are fabricated on silicon substrate and have the same cross section, but differ in length. The characteristic impedance of the lines is extracted up to 65 GHz by using the ABCD-parameters, then, it is analyzed to determine the most reliably de-embedding method for each transmission line (TL). Also, the dependent frequency S-parameters of the de-embedded lines are obtained and it is shown that below 10 GHz, the extracted data agree well for the different methods and the accuracy is high.