Thermal stability simulation of MEMS micro scanner: Multi-physics simulations coupled with experimental verifications

A practical application of multi-physics simulations was presented. In order to analyse thermal stability of MEMS micro scanner, multi-physics simulation procedure was proposed and then verified by comparing the simulated results to the measured data. The proposed procedure started from defining simulation parameters and was verified stepwise by comparing the interim results with the related experimental data, which has increased the accuracy of the proposed, multi-physics simulation procedure. Based on those results, we could got more insight into the thermal stability issue and the allowable bias limit could be determined, which does not deteriorate the device performance significantly. The proposed simulation procedure is expected to contribute for successful commercialization of MEMS micro scanner by increasing its thermal stability.