Design and performance of thin-film μTEG modules for wearable device applications

A thin-film micro thermoelectric generator (μTEG) applicable to wearable devices is investigated. This μTEG module has a transverse configuration of the Seebeck elements and thus can adapt to microfabrication process with a thin-film thermoelectric material. A design method to maximize the output of the μTEG is developed, and its performance is analyzed. A high output power of 10mW with an output voltage of 1V could be achieved for a wrist-band-style module-mounting.