Influence of ZnO nanorods on sensitivity of SAW mass sensor

The article contains the analysis of the influence of ZnO nanorods parameters on sensitivity of surface acoustic wave (SAW) mass sensors on the lithium niobate substrate. The model of SAW mass-sensitive sensor enhanced with ZnO nanorods was built by the finite element method. The dependences of the resonant frequency of the SAW sensor on the mass loading on the lithium niobate and lithium niobate with ZnO nanorods were calculated. Applying of ZnO nanorods as sensing element allowed increasing of sensor sensitivity in about 4 times.