Impacts of censoring on lifetime analysis by two-step probability plot in defect clustered TDDB

Lifetime distribution characteristics of FEOL/MOL/ BEOL time-dependent breakdown (TDDB) with defect clustering conditions were investigated by using a recently proposed two-step probability plot. This method was proposed to estimate parameters of the lifetime distribution function that is based on the defect clustering concept, and has two shape parameters. In the first step, the clustering parameter is estimated by a linearization procedure on a proposed chart. In the second step, shape and scale parameters are estimated by the slope and intercept of the plot. The impacts of censoring are investigated statistically by using Monte Carlo simulation (MCS) and the mean squared error (MSE) of the estimators.