A comprehensive study of NEMS-based piezoresistive gyroscopes for vestibular implant systems

This work reports on the possibility to use gyroscopes based on piezoresistive NEMS gauges in vestibular implants. The specifications for this application are critically discussed, and used to derive parameters required at the sensor level and integrated circuit level. An algorithm to transform the acquired signals from the gyroscope reference system into the firing rate of vestibular nerves is also developed. The convenience in using gyroscopes based on nano-gauges lies in their possibility to operate at low voltages, compatible with implantable devices. A 3-axis gyroscope matching vestibular implant requirements is demonstrated at 0.35-mA, 2.8-V, without voltage boosting.