Investigation of a low-cost broad-range silicon-based temperature sensor

This paper documents research into a new type of low-cost silicon-based broad-range (25/spl deg/C-500/spl deg/C) temperature sensor targeted for use in household appliances. Conventional temperature sensing devices, such as platinum thermistors, are expensive to apply to cost-sensitive appliance markets. The data and manufacturing process presented in this paper suggest doped silicon sensors are a feasible lower cost alternative to their platinum counterparts.