Surface-bulk micromachined on-chip monopole antenna for 77 GHz automotive radar applications

This paper presents a micormachined quarter wavelength monopole antenna operating at the millimeter wave band for automotive radar application, specifically at 77 GHz. The antenna will be realized using surface micromachining on a low resistive thick silicon substrate and fed by coplanar waveguide. Bulk micromachining is used to etch silicon underneath the antenna in order to reduce the Ohmic losses in the substrate. The proposed antenna is analyzed and optimized using CST. The obtained bandwidth, gain, directivity, and efficiency are 40.25%, 3.55 dBi, 5.49 dBi, and 64%, respectively.