Optimization of thickness distribution of micro-membrane by genetic algorithm

A simulation method for optimizing dynamic motion of micro-electro-mechanical devices and systems (MEMS) is proposed. A series of equations of electrostatic field, fluid dynamics and deflection of micro-membrane are coupled and solved simultaneously. Since the genetic algorithm is appropriate to reduce the search space of solution, /spl square//spl square/ is used to optimize the thickness distribution of a micro-membrane. As an application of the developed method, the thickness distribution of the micro-membrane of a micro-air-pump is optimized. The prescribed performance of the micro-air-pump can be calculated.