Optimal experiment design in poly etch process for performance improvement on different type tool

In this paper, the solution to optimize poly etch condition on different type tool was studied. In this course, we investigated the potentiality of recipe optimization on different type tool by applying an optimal experiment design (OED) to the poly etch step. In our case, the experiments were carried out with four factors/three levels response surface method (RSM). Base on experiences, we select a, b, c, d parameter as four factors to do the design of experiment. After DOE (design of experiment) data analysis, we finally take the process condition of 64/56/130/6.6 (a / b / c / d) as the optimal poly etch condition for the different type tool.