Rigorous coupled wave analysis for deep structures with internal field distribution

The rigorous coupled wave analysis is demonstrated by employing a recursive propagation algorithm based on an Airy-like internal reflection series, modified for a general cross-sectional distribution of permittivity. The method is capable of determining the electromagnetic field value at any point of the structure of any depth. Examples of simulation are presented on a nearly sinusoidal relief grating fabricated on the top of a Ni substrate.