Modeling Nanoelectromechanical Switches With Random Surface Roughness

Surface roughness is an important physical feature of nanometer-scale electromechanical (NEM) devices but typically is not considered in their numerical analysis. In this paper, computer simulations of a single-pole double-throw NEM switch with surface roughness are presented. Roughness is shown to modify the eigenfrequencies of the system, and also to make it possible for the switch to not close successfully. The importance of avoiding a free-standing cantilever is demonstrated.