Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron Spectroscopy

The new generation of spectrometers with high energy resolution can resolve elastic peaks of electrons reflected by atoms in solids. In this regard, there is an increasing interest in the applications of the so-called Elastic Peak Electron Spectroscopy (EPES) for measuring composition-versus-depth profiles since it is non-destructive and sensible to the presence of hydrogen in solids. This study presents numerical tools for quantitative interpretation of the EPES signal. They include modules for peak detecting, estimating the elastic peak intensities and retrieving composition-versus-depth profiles. The latter is based on the transport theory and invokes the straight line approximation (SLA). The examples of profile retrieval using the SLA are given. The accuracy of the proposed model is analyzed.