Accurate and Efficient Self-Calibration Algorithm of Broadband On-Wafer Scattering-Parameter Measurements for Production Test Applications Up to 110 GHz

This paper presents an accurate and efficient on-wafer calibration algorithm of broadband scattering-parameter measurements for radio-frequency integrated circuit production test applications. Three on-chip calibration standards with the same probe positions as those of the devices under test (DUTs) were designed to take advantage of fixed probe heads in the x-y directions during calibration and measurements. In addition, three on-chip standards-a series resistor and a shunt resistor (both of which have an offset line segment) as well as a transmission line (TL)-do not have to be characterized in advance, and the measurement reference impedance can be acquired further though self-calibration without an impedance-standard substrate (ISS). Simulation studies and experimental confirmation were conducted on GaAs substrates, from 2 to 110 GHz, in addition to comparisons of the multiline thru-reflect-line (TRL) calibration results.