Investigation of ring microstrip resonators for a microwave microplasma source

Microplasma microwave sources are widely used in a bio-microelectromechanical sterilization systems, in materials processing, in a microchemical analysis systems. The possibility of ignition of microwave low-power plasma using ring microstrip resonators tuned to the frequency of 900 to 1500 MHz was investigated. We have simulated the ring resonators with microstrip gap size of 100 to 500 microns. Prototyping model of the resonant systems on different frequencies was produced and investigated. The «cold» measurement of resonators to clarify the parameters and design optimization was carried out, the experimental equipment for investigating the microwave low-power plasma was adjusted.