MEMS with an embedded fluidic microchannel for sensitive weighing of liquid samples

This paper reports hollow MEMS plate oscillators for the characterization of liquid samples, with a one-fold improvement in both Q-factor and Allan deviation compared to previous alike structures, and fluidic constriction larger than 1μm. These new characteristics make the devices amenable for the first time to liquid weighing with a 100 Hz.(g.L
^-1
)
^-1
sensitivity and a few g.L
^-1
detection floor.