A passively temperature-compensated dual-frequency aln-on-silicon resonator for accurate pressure sensing

This paper reports a passively temperature-compensated dual-frequency micromachined resonator which has been experimentally demonstrated to perform accurate sensing of differential pressure. This resonating device incorporates passive temperature compensation techniques, different sub-resonator cavity structures and dual-resonance frequency property, all aimed at applying it in accurate pressure sensing. Its application as an acoustic wave pressure sensor has been demonstrated, with low non-linearity of 1.20 % F.S. over a pressure range of 150 psi, and low thermal zero shift of 0.15 % F.S./°C over a temperature range of 360 °C. The reported device has promising potential for accurate wide-range pressure sensing over wide temperature range, yet minimally affected by ambient temperature, in ruggedized environments like oil-drilling.