Dielectrophoretic cell sorting via sliding cells on 3D silicon microelectrodes

This work presents an innovative design for a flow-through dielectrophoretic cell sorting based on silicon bulk microelectrodes featuring sidewall undercuts. The microelectrodes are configured into an interdigitated array with digits extending across the flow chamber at an oblique angle against the flow stream. Target cells under dielectrophoretic forces and hydrodynamic drag can slide along the digits to a dedicated outlet. The design has been showcased for continuous-flow sorting of viable and non-viable mammalian cells, achieving a throughput of 16,600 cells/min, an order of magnitude higher than those reported for existing continuous-flow cell sorting designs using thin-film or volumetric microelectrodes.