MEMS switching circuits for reconfigurable space communication systems

In this paper, basic MEMS switching networks fabricated on alumina substrate have been presented. Such devices could be used to design multiple input-output switching matrixes able to select and steer RF signals to satellite smart antennas for example. For their low loss, low power consumption and high linearity, MEMS switches appear to be particularly well suited for these applications. This paper also presents an original approach with MEMS switching function integration and packaging directly with others circuits fabricated on the same wafer. This approach should permit to develop high efficiency and limited cost switching networks for space applications.