Fast response time photodetector based on annealed TiO2 nanowires deposited by GLAD

The vertically aligned TiO₂ NWs were successfully deposited on Si substrate by GLAD technique using pressed and sintered TiO₂ pellets inside the e-beam chamber. The FE-SEM images show the top and cross section view of the annealed NWs samples at 600 °C. The EDS analysis of annealed NWs show the presence of Oxygen (O₂) ~ 72.27% and Titanium (Ti) ~ 27.73%. The TiO₂ NWs based device shows the high turn-on voltage ~+3V under dark condition which reduces to ~+1.5V under light illumination. Under ON/OFF switching, the dark current was measured ~5.75 nA which increases to ~63.25 nA under light illumination. The Al/TiO₂-NW Schottky device possesses a fast response time with a rise time of ~0.16 sec and fall time of ~0.31 sec, which confirms a good candidate for photodetection applications.