A compact 6-bit phase shifter in 0.35 µm SiGe BiCMOS technology

This paper presents a compact 14-18 GHz 6-bit digital phase shifter based on 0.35-μm SiGe BiCOMS technology. Three different topologies are adopted to achieve the desired phase shift with low insertion loss, accurate phase shifting and small parasitic amplitude modulation. The simulated performance of all 64 states of the phase shifter demonstrates an insertion loss of 9±0.9 dB and a RMS phase error <;4° with P
_1dB
better than 11dBm. The input return loss and output return loss are better than -12 dB and -13.5dB over the 14-18 GHz frequency range respectively. And the chip size of this phase shifter is only 0.79×0.42 mm
²
excluding PADs.