Electron beam patterning on permeable polymer membranes for nanolithography and microfluidic applications

Initial results are described on using lithographic techniques to pattern permeable polymer membranes using electron beam and optical techniques. The patterned membranes have a spatially selective permeability to electrolytes or to vapor phase reactants. Applications for the membranes include a non-optical method for patterning and for microfluidic applications. Two methods are demonstrated for fabricating the permeable membranes including patterning directly on the surface and on a sputtered metal coating.