The shape memory effect in nanoscale composites based on Ti2NiCU alloy

The shape memory effect (SME) in alloys with thermoelastic martensitic transformation provides a unique possibility to create the tiny mechanical devices for NEMS / MEMS technology. SME observed in layered composite microstructors produced by FIB CVD technology, consisting of Ti2NiCu alloy layer with SME and platinum elastic layer at reducing the thickness of the active layer for at least 80 nm. In this paper the physical and technological restrictions were experimentally examined on the minimum thickness of the active layer of the composites for SME manifestation.