Modeling and experimental testing of a composite bridge type amplifier based nano-positioner

This paper presents a hybrid modeling method combining the pseudo-rigid-body-model (PRBM) and Euler-Bernoulli beam theory for a composite bridge-type amplifier (CBTA) based nano-positioning stage. Considering the compliance of the input end, the tensile stiffness of the flexure hinge, as well as the effect of external load, the analytical model of the CBTA are established to predict the input stiffness and the input/output displacement amplification ratio based on the hybrid modeling method. The static model of the nano-positioning stage is also developed for the decoupling and guiding mechanisms as the external load of the CBTA. It is shown that the new analysis method can derive a more accurate model of the nano-positioning stage, which is further verified by the finite element analysis (FEA) and experimental results.