The measurement method of 2D distribution of EMI in the on-chip power distribution network

The two-dimension distribution of EMI in the on-chip power distribution network provides valuable information for understanding the immunity behavior of the integrated circuit. This paper presents an EMI sensor array to measure the distribution. The sensor generates periodical noise on the supply. The spectrum of generated noise is considered as the feedback signal. The power distribution network of the host integrated circuit is utilized as the propagation channel of the feedback signal. The innovation of this distribution measurement method are the following: No extra pin is required to generate any control signal or to detect the feedback signal; No modification is made on the host power distribution network; The sensor can be easily realized with standard cells. The design of sensor array is implemented with Global Foundry 180nm process. The proposed sensor array method is verified by both transistor-level simulation and hardware experiment.