Abstract:
This paper reports on a theoretical and experimental study of substrate-decoupled three-dimensional micro-shell resonators made of silicon dioxide (SiO2). Design, fabrica...Show MoreMetadata
Abstract:
This paper reports on a theoretical and experimental study of substrate-decoupled three-dimensional micro-shell resonators made of silicon dioxide (SiO2). Design, fabrication and test results of a microscale SiO2 thin-film shallow shell resonator anchored through a hollow cylindrical post is presented. Virtual levitation of the resonator because of the hollow cylinder is explained and the results are discussed. A Q of 85,000 was measured at 10 kHz from a resonator with diameter of 900 μm and thickness of 1 μm.
Published in: 2016 IEEE SENSORS
Date of Conference: 30 October 2016 - 03 November 2016
Date Added to IEEE Xplore: 09 January 2017
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