Correlations between plasma induced damage and negative bias temperature instability in 65 nm bulk and thin-BOX FDSOI processes

We evaluate Plasma Induced Damage (PID) and Negative Bias Temperature Instability (NBTI) by measuring frequency of Ring Oscillators (ROs). Initial frequency degradation by PID from Antenna Ratio (AR) of 500 to 1k are 2.1% and 1.9% in the bulk and thin-BOX FDSOI, respectively. NBTI is accelerated by PID in less than 500 AR which is the upper limit of the antenna rule. NBTI correlates with PID and also with initial frequency. The correlation coefficient (CC) between NBTI-induced degradations and the initial frequency is 0.68 in FDSOI, while there is few correlation in bulk (CC = 0.24) because random dopant fluctuation is dominant.