Modeling of the millimeter-wave behavior of MEMS capacitive switches

The analysis of the millimeter-wave behavior of micromechanical capacitive switches by the method of lines (MoL) is presented. For this purpose the method of lines is extended for consideration of very thin lossy metallic and dielectric layers without increasing the numerical effort by modifying the difference operators in a suitable way. The calculated results of a metal membrane switch show very good agreement to measured data.