Calculation of capacitance for planar capacitors

The method for calculation of the capacitance is considered for capacitors with rectangular and circular cross-section. The method is simple and has high accuracy. The method utilizes known formulae for micro-strip line segment wave resistance, effective dielectric permittivity, effective width and length of the micro-strip line segment. Results of capacitance calculation for the plane capacitor with circular cross-section are compared with results obtained by finite element method.