Nano-granular Layers for Sensor Applications fabricated by Means of Electron Beam induced Deposition

This work combines the Electron Beam induced Deposition technique with a purposeful scanning pattern generation for the scanning electron microscope by means of a self-developed scan generator. This allows for deposition of nanogranular metal structures with specific geometries, which can be used as strain sensors on the nano- and microscale. Furthermore, the deposition process is combined with a vision-based automation sequence using a self-developed software framework for drift compensation.