Sensors and calibration standards for precise hardness and topography measurements in micro- and nanotechnology

Silicon sensors and calibration standards open up many possibilities for more accurate and simpler optical and tactile measurements in micro and nanotechnology. Optical measuring instruments are widely used because they allow three-dimensional measurements, while requiring little measuring time. Tactile instruments measure only two-dimensionally and are relatively slow, but are often used for reliable reference measurements. The contribution describes new calibration standards for optical and tactile instruments, which were manufactured using silicon micromachining and high precision diamond turning. Furthermore new tactile microsensors are described which will enable future fast tactile surface measurements at small measuring force or indentations in very thin layers at probing forces in the micro- and nano-Newton range.