Ion energy distributions at a cathode in a non-sputtering magnetron discharge

A pulsed non-sputtering magnetron discharge (NSMD) has been studied by Langmuir probe diagnostics and a retarding field energy analyzer (RFA) mounted inside the cathode. Both axial and radial profiles of plasma density and electron temperature are nearly uniform in the magnetic null region. The plasma potential measurements have yielded a positive anode sheath voltage drop U
_as
~ 0.4U
_d
and a corresponding cathode sheath drop U
_cs
~ 0.6U
_d
. RFA results demonstrate that the energy of ions incident at the cathode surface during NSMD does not exceed eU
_cs
. This result is in accordance with the observed inhibition of sputtering process in the NSMD.