Proof of concept for a WR-2.2 MEMS waveguide switch

Until now, MEMS waveguide switches were only built for frequencies up to 120 GHz. In this paper, first results of a waveguide SPST MEMS switch for the 330-500 GHz band (WR-2.2) is presented. For this switch, 3.3 mm long zipper actuators of electroplated nickel are inserted into a waveguide, perpendicular to the H-plane of the wave. The actuators have an actuation voltage of 95 V. The performance of purely passive devices was measured. The transmission in the off-state is lower than -25 dB for frequencies between 360 and 500 GHz, whereas the transmission in the on-state and the reflection in the off-state exceeds -6dB.