Study of influence physical and technological parameters of deposition on the structure, physical and mechanical properties of vacuum arc coatings (Mo + Ti6%Si)N

Multilayer coatings (Mo+Ti6%Si)N were obtained by means of vacuum arc deposition method from unit-cast cathodes (Ti6%Si). The influence of deposition parameters in the atmosphere of nitrogen reactive gas, the morphology of growth, phase composition, structure, physical and mechanical characteristics of the obtained coatings were examined by means of scanning electron microscopy with the use of energy dispersive elemental analysis, X-ray analysis, and microindentation method; the investigations were carried out before and after high temperature annealing. The results of the investigation have shown that in the conditions of high temperature annealing, structural and phase state of the coatings prone to ordering with the formation of silicide phases is formed. When the nitrogen content is up to 20 at. %, the phases Ti5Si3 are formed after the annealing, the hardness of the coating has a value of 45.2 GPa.