Development of cell microarray by using superhydrophilic silicon dioxide nano structure

Studies on cellular behaviors on substrates with various physicochemical properties have important implications in cytology and bio-medical field. And a variety of cell microarrays have been developed to study in vitro. Our study aims to explore the relations between nano silicon dioxide structure substrates and circulating tumor cells (CTCs) adhesion, and create cell microarrays based on the cell adhesions with the substrate. The method for the preparation of microarray presented herein is based on creating a superhydrophilic array by DRIE technology and thermal oxidation. Superhydrophilic microarrays were achieved as a convex array on SOI wafer. The extreme wettability of the superhydrophilic arrays guaranteed an easy and homogeneous adsorption of the cells, while flat silicon dioxide barriers effectively prevented cross-contamination of the cells.