Atmospheric spatial atomic-layer-deposition of Zn(O, S) buffer layer for flexible Cu(In, Ga)Se2 solar cells: From lab-scale to large area roll to roll processing

In this manuscript we present the first successful application of a spatial atomic-layer-deposition process to thin film solar cells. Zn(O, S) has been grown by spatial atomic layer deposition (S-ALD) at atmospheric pressure and applied as buffer layer in rigid and flexible CIGS cells by a lab-scale (15×15 cm
²
) S-ALD set-up. We achieved values of cell efficiency (16 %) higher than the reference cells on glass substrate.