Field-Related Failure of GaN-on-Si HEMTs: Dependence on Device Geometry and Passivation

This paper reports on an extensive analysis of the breakdown of GaN-based Schottky-gated HEMTs submitted to high-voltage stress. The analysis was carried out on transistors with different lengths of the drain-side gate-head (
$L_{\mathrm {GH}}$
), corresponding to different levels of electric field across the SiN passivation. Based on dc measurements, 2-D simulations, and optical analysis, we demonstrate the following original results: 1) when submitted to high drain voltages (in the OFF-state), the transistors can show catastrophic failure; 2) electroluminescence microscopy indicates the presence of hot-spots on the drain-side of the gate; 2-D simulations support the hypothesis that failure occurs in correspondence of the gate-head, on the drain-side edge, where the electric field in the silicon nitride passivation has its maximum; 3) this hypothesis is confirmed by the results of transmission electron microscope failure analysis that demonstrate the generation of a leakage path between the gate metal and the channel, 4) and by the dependence of the destructive voltage on the
$L_{\mathrm {GH}}$
value. 5) in addition, we propose and demonstrate an approach for improving the reliability of the devices, i.e., using a graded SiN passivation with increased thickness. The results described in this paper provide important information for the device optimization of Schottky-gated HEMTs.