Multiple micro-cavity laser with /spl lambda//4-wide deep grooves buried with benzocyclobutene

Multiple micro-cavity (MMC) lasers, which consist of /spl lambda//4-wide deep grooves buried with benzocyclobutene (BCB) polymer, were realized by the CH/sub 4//H/sub 2/-RIE dry etching process. Threshold current as low as 30 mA was obtained at 200 K for the micro-cavity length 5.1 /spl mu/m (groove width 183 nm, pitch /spl Lambda/=5.3 /spl mu/m, total cavity length L=300 /spl mu/m, stripe width W/sub s/=5 /spl mu/m). A stable single-wavelength operation for a wide temperature range (100-200 K) was obtained with the temperature coefficient 0.06 nm/deg. The room temperature operation of an MMC laser consisting of 3/spl lambda//4-BCB buried grooves (=0.70 /spl mu/m) was also obtained with threshold current as low as 18 mA for the total cavity length of 200 /spl mu/m (/spl Lambda/=20=/spl mu/m, 10 elements, W/sub s/=5 /spl mu/m), and the effective reflectivity of the MMC structure was estimated to be 94%.