Properties of solution TMI/sup TM/ as an OMVPE source

Solid trimethylindium (TMI) is the precursor of choice for the vast majority of MOVPE applications. However consistent pick up has been a problem under normal operating conditions. Epichem's solutions to this problem have included solution TMI/sup TM/ (TMI suspended in a high boiling point amine adducted to TMI) and dual reverse flow bubblers of solid TMI. A detailed investigation of solution TMI/sup TM/ is being continued at Epichem in order to understand the chemical and physical properties of this indium source. Results have proved solution TMI to have a more consistent 'pick up' than any alternative method and it has been identified as the best precursor for low oxygen applications.