Parametric Analysis of Silicon Nanowire Optical Rectangular Waveguide Sensor

A silicon nanowire optical rectangular waveguide (SNORW) on 220-nm silicon-on-insulator platform is proposed for optical sensing of gases. Analysis and interdependence of critical parameters of SNORW are evaluated. Overall performance in terms of power confinement, waveguide sensitivity, and compactness is compared with that of conventional slot and ridge slot waveguides. Exploratory results on SNORW application as methane sensor are also discussed.