Validated simulation models for factory control

The authors describe the use of the ACHILLES simulation model in the wafer fabrication facility of Silicon Systems Inc. at Tustin, California. The accuracy of the model results from initialization, calibration, and validation procedures. The validated model was used to reduce by one-half the cycle time of a major process in a multiprocess operating environment. The validation procedure enhances installed CAM (computer-aided manufacturing) systems by improving the accuracy and value of operation information in the CAM database.<>