Mechanism and driving method of an inertial driven micromanipulator

This paper proposes an inertial driven micromanipulator utilizing BEMA, a bending and expanding motion actuator. The goal of this paper is to improve the speed of the manipulator by means of optimum voltage pattern. In this paper, motion of the manipulator dependence on voltage pattern was investigated. Also, a design method for making an optimum voltage pattern was proposed. The optimum voltage improved the manipulator's motion speed by 5 times with respect to the conventional one.