Embedded Nano-Electro-Mechanical Memory for Energy-Efficient Reconfigurable Logic

A compact, reconfigurable look-up table (LUT) implemented with an array of nano-electro-mechanical memory cells formed using CMOS back-end-of-line metal layers is proposed. The advantages of this LUT architecture over resistive memory- and CMOS-based implementations include faster and more energy-efficient operation. Pre-programmed answers can be read out within 1 ns, consuming less than 10 fJ.