A two-dimensional transducer array for real-time 3D medical ultrasound imaging

A high density 2D transducer array designed for 3 MHz echocardiography imaging has been developed in the frame of a real-time 3D ultrasound system project. This 2D array is using advanced interconnect and microstructuring technologies. The interconnect structure is fabricated through the backing material by placing microflex circuits perpendicular to the array plane. The structuring of small transducer elements with 308 micrometer pitch is done by a combination of controlled saw dicing of the piezoelectric material and laser ablation of the matching layers. Design, fabrication and characterization of the first prototypes are presented.