1.4 kV, 25 A, PT and NPT trench IGBTs with optimum forward characteristics

In this paper, we report the development of 1.4 kV 25 A punch-through (PT) and nonpunch-through (NPT) trench IGBTs with ultra-low on-resistance, latch-up free operation and highly superior overall performance when compared to previously reported DMOS IGBTs in the same class. We have fabricated both PT and transparent anode NPT devices to cover a wide range of applications which require very low on-state losses or very fast time with ultra-low switching losses. The minimum forward voltage drop at the standard current density of 100 A/cm/sup 2/ was 1.1 V for PT nonirradiated devices and 2.1 V for 16 MRad PT irradiated devices. The nonirradiated transparent emitter NPT structure has a typical forward voltage drop of 2.2 V, a turn-off time below 100 ns and turn-off energy losses of 11.2 mW/cm/sup 2/ at 125 C. The maximum controllable current density was in excess of 1000 A/cm/sup 2/.