Optimized technology for freely positionable Josephson junctions in YBa/sub 2/Cu/sub 3/O/sub 7-x/ fabricated by local ion damaging

Freely positionable Josephson junctions in high-temperature superconductor thin films are fabricated by a combination of photo- and electron-beam lithography. In selected regions of YBCO thin films point defects are induced by oxygen implantation. These weak links exhibit resistively shunted junction (RSJ)-like voltage-current characteristics close to the junction transition-temperature. Below this temperature, a transition from RSJ to flux-flow behavior is observed. Fraunhofer patterns appear in magnetic modulation measurements at different temperatures. The temperature dependence of the critical current reveals superconductor/normal conductor/superconductor (SNS) features. The dependence of Shapiro steps on microwave power demonstrates Josephson contributions over the entire temperature range.