High efficiency 400 dpi AlGaAs LED array fabrication for PMS (polygon mirror scanning)

A PMS consists of LED array, lens, polygon-mirror, and motor. A PMS's light sources is the linear LED array. We have fabricated a 400 dpi LED array using GaAs/AlGaAs (Al/spl sim/0.65) single heterojunction structure. Problems of AlGaAs LED arrays are among the emitters. Thus, we have performed isolation by RIE and wet etching. RIE experiments were carried out at room temperature and used a mixture of gases under a variety of etching conditions. The n and p ohmic contacts were made with AuGe/Ni/Au and AuZn/Pd/Au, respectively. The AlGaAs LED array showed good quality with low forward turn-on voltages and high brightness.