10 GHz range extremely low-loss ladder type surface acoustic wave filter

Here we investigate a 10 GHz range low-loss SAW filter using a ladder type structure. It is fabricated on 128/spl deg/ Y-X LiNbO/sub 3/ using direct writing electron beam (EB) lithography techniques and lift-off process. Sub-0.1 /spl mu/m Al electrodes with the width of 95 nm and thickness of 30 nm are fabricated successfully. Experimental results show extremely low loss characteristics. The minimum insertion loss of 3.4 dB in 10 GHz range and much reduction of the electromagnetic feed through of more than 25 dB range are obtained. They show the potential of SAW devices for 10 GHz range communication systems.