Temperature Microsensor/Microactuator Based on Magnetic Microwire for MEMS Applications

The aim of this paper has been the development of a new type of temperature microsensor/microactuator working on the principle of the thermo-elastic (TE) deformation of multilayer magnetic microwire consisting of a glass-coated Co
₇₆
Si
₁₁
B
₁₃
metallic core and an electroplated Co
₉₀
Ni
₁₀
external shell. The application of an electrical current along the microwire in the range 20-35 mA results in the TE mechanical bending of fixed sample, which is recorded. That mechanical deformation is interpreted to be a consequence of the resulting Joule heating, and its amplitude is directly proportional to the applied dc current in the mentioned range. Moreover, the direct proportionality between TE deformation and the resulting increase of temperature was experimentally confirmed. In this way, the new type of temperature microsensor/microactuator working on the principle of TE deformation has been developed. This opens new technological application of microwires as temperature microsensors and temperature-driven microactuators for micro-electro-mechanical system devices.